CRS4

XEBIC at a Dual Beam

Massimo Vanzi, Simona Podda, Elodia Musu, Robert Cao
Microelectronics Reliability, Volume 53, Number 9-11, page 1399-1402 - september 2013

Références BibTex

@Article{VPMC13,
  author       = {Vanzi, M. and Podda, S. and Musu, E. and Cao, R.},
  title        = {XEBIC at a Dual Beam},
  journal      = {Microelectronics Reliability},
  number       = {9-11},
  volume       = {53},
  pages        = {1399-1402},
  month        = {september},
  year         = {2013},
  publisher    = {Elsevier},
  keywords     = {EBIC, Dual beam, Cross-sectional EBIC},
  issn         = {0026-2714},
  url          = {https://publications.crs4.it/pubdocs/2013/VPMC13},
}

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» Massimo Vanzi
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