XEBIC at a Dual Beam
Microelectronics Reliability, Volume 53, Number 9-11, page 1399-1402 - september 2013
Références BibTex
@Article{VPMC13,
author = {Vanzi, M. and Podda, S. and Musu, E. and Cao, R.},
title = {XEBIC at a Dual Beam},
journal = {Microelectronics Reliability},
number = {9-11},
volume = {53},
pages = {1399-1402},
month = {september},
year = {2013},
publisher = {Elsevier},
keywords = {EBIC, Dual beam, Cross-sectional EBIC},
issn = {0026-2714},
url = {https://publications.crs4.it/pubdocs/2013/VPMC13},
}